Design of an integrated sensor system for the detection of traces of different molecules in the air

D. Strle; I. Muševič

doi:10.1117/12.2075333

3 April 2015 Design of an integrated sensor system for the detection of traces of different molecules in the air

D. Strle, I. Muševič

Proceedings Volume 9434, Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2015; 943404 (2015) https://doi.org/10.1117/12.2075333
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2015, San Diego, California, United States

Abstract

This article presents the design of a miniature detection system and its associated signal processing electronics, which can detect and selectively recognize vapor traces of different materials in the air – including explosives. It is based on the array of surface-functionalized COMB capacitive sensors and extremely low noise, analog, integrated electronic circuit, hardwired digital signal processing hardware and additional software running on a PC. The instrument is sensitive and selective, consumes a minimum amount of energy, is very small (few mm³) and cheap to produce in large quantities, and is insensitive to mechanical influences. Using an electronic detection system built of low noise analog front-end and hard-wired digital signal processing, it is possible to detect less than 0.3ppt of TNT molecules in the atmosphere (3 TNT molecules in 10¹³molecules of the air) at 25°C on a 1 Hz bandwidth using very small volume and approx. 10 mA current from a 5V supply voltage. The sensors are implemented in a modified MEMS process and analog electronics in 0.18 um CMOS technology.

Citation Download Citation

D. Strle and I. Muševič "Design of an integrated sensor system for the detection of traces of different molecules in the air", Proc. SPIE 9434, Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2015, 943404 (3 April 2015); https://doi.org/10.1117/12.2075333

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available