Carbon and fluorine co-implantation for boron diffusion suppression in extremely ultra shallow junctions

Andrey V. Miakonkikh; Aleksander E. Rogozhin; Valeriy I. Rudakov; Konstantin V. Rudenko; Vladimir F. Lukichev

doi:10.1117/12.2181006

18 December 2014 Carbon and fluorine co-implantation for boron diffusion suppression in extremely ultra shallow junctions

Andrey V. Miakonkikh, Aleksander E. Rogozhin, Valeriy I. Rudakov, Konstantin V. Rudenko, Vladimir F. Lukichev

Author Affiliations +

Proceedings Volume 9440, International Conference on Micro- and Nano-Electronics 2014; 94400L (2014) https://doi.org/10.1117/12.2181006
Event: The International Conference on Micro- and Nano-Electronics 2014, 2014, Zvenigorod, Russian Federation

Abstract

Formation of ultra shallow p+-junctions in silicon by plasma immersion ion implantation were investigated. The effect of carbon and fluorine coimplantation were studied experimentally. Dependence of this effect from carbon concentration was studied, as well as positive role of multistep annealing for pure boron implanted samples.

Citation Download Citation

Andrey V. Miakonkikh, Aleksander E. Rogozhin, Valeriy I. Rudakov, Konstantin V. Rudenko, and Vladimir F. Lukichev "Carbon and fluorine co-implantation for boron diffusion suppression in extremely ultra shallow junctions", Proc. SPIE 9440, International Conference on Micro- and Nano-Electronics 2014, 94400L (18 December 2014); https://doi.org/10.1117/12.2181006

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available