Electrostatically actuated MEMS switch with resistive contact

Ilya V. Uvarov; Victor V. Naumov; Roman V. Selyukov

doi:10.1117/12.2179558

18 December 2014 Electrostatically actuated MEMS switch with resistive contact

Ilya V. Uvarov, Victor V. Naumov, Roman V. Selyukov

Proceedings Volume 9440, International Conference on Micro- and Nano-Electronics 2014; 94400W (2014) https://doi.org/10.1117/12.2179558
Event: The International Conference on Micro- and Nano-Electronics 2014, 2014, Zvenigorod, Russian Federation

Abstract

MEMS switch with the electrostatic actuation and the resistive contact was fabricated using surface micromachining. The movable electrode of the switch was the three-layer metallic cantilever having nanoscale thickness and high lengthto- thickness ratio. Low stiffness of the cantilever allowed to approach relatively low values of the actuation voltage. The theoretical analysis and experimental study of the switching characteristics was performed.

Citation Download Citation

Ilya V. Uvarov, Victor V. Naumov, and Roman V. Selyukov "Electrostatically actuated MEMS switch with resistive contact", Proc. SPIE 9440, International Conference on Micro- and Nano-Electronics 2014, 94400W (18 December 2014); https://doi.org/10.1117/12.2179558

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