White-light interferometry with high measurement speed

Pavel Pavliček; Vojtěch Svak

doi:10.1117/12.2084973

5 December 2014 White-light interferometry with high measurement speed

Pavel Pavliček, Vojtěch Svak

Proceedings Volume 9441, 19th Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics; 944115 (2014) https://doi.org/10.1117/12.2084973
Event: XIX Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 2014, Jelenia Gora, Poland

Abstract

White-light interferometry is an established and proven method for the measurement of the shape of objects. White-light interferometry is able to measure the shape of objects with optically smooth as well as optically rough surfaces. A major disadvantage of white-light interferometry is its low scanning velocity and the long measurement time related. We present a system that measures the shape of object with optically rough surface and can achieve the scanning velocity up to 100 μm/s with a standard frame rate of 25 Hz. The experimental results are shown.

Citation Download Citation

Pavel Pavliček and Vojtěch Svak "White-light interferometry with high measurement speed ", Proc. SPIE 9441, 19th Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 944115 (5 December 2014); https://doi.org/10.1117/12.2084973

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available