Paper
5 December 2014 Optical investigation of the AlGaAs/GaAs LED with photonic structures patterned by the EBDW lithography
P. Hronec, F. Uherek, J. Škriniarová, J. Kováč, D. Pudiš, R. Andok
Author Affiliations +
Proceedings Volume 9441, 19th Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics; 94411T (2014) https://doi.org/10.1117/12.2087770
Event: XIX Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 2014, Jelenia Gora, Poland
Abstract
In this work we focus on the application of the two dimensional photonic crystal (2D PhC) embedded in the surface of Al0.295Ga0.705As/GaAs multi-quantum well light emitting diode (LED) to enable improvement of the light extraction from the LEDs. The 2D PhC structures described in this contribution were fabricated by the E-Beam Direct Write (EBDW) Lithography and consist of pillars with the period of 700 nm. In this paper a new approach is presented to measure the PhC-LEDs based on evaluating light-current characteristics from Near Surface Light Emission Image (NSLEI) measurements in comparison with standard light-current characteristics measured by integrating sphere. The measured LED emission intensity increased by 20-30% when PhC was patterned on the top of LED structure in comparison with the reference LED without PhC. In addition, it was found that the measured light extraction intensity is higher in the case of NSLEI measurements. This originates in the ability that mostly the light intensity emitted from the LED surface is measured while the edge emission effect is suppressed.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
P. Hronec, F. Uherek, J. Škriniarová, J. Kováč, D. Pudiš, and R. Andok "Optical investigation of the AlGaAs/GaAs LED with photonic structures patterned by the EBDW lithography", Proc. SPIE 9441, 19th Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 94411T (5 December 2014); https://doi.org/10.1117/12.2087770
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KEYWORDS
Light emitting diodes

Electron beam direct write lithography

Etching

Photonic crystals

Integrating spheres

Gallium arsenide

Edge emitting semiconductor lasers

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