Grating encoder for wide range three-axis displacement measurement

Jie Lin; Jian Guan; Feng Wen; Jun Luo; Peng Jin

doi:10.1117/12.2082475

6 March 2015 Grating encoder for wide range three-axis displacement measurement

Jie Lin, Jian Guan, Feng Wen, Jun Luo, Peng Jin

Proceedings Volume 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation; 944602 (2015) https://doi.org/10.1117/12.2082475
Event: International Symposium on Precision Engineering Measurement and Instrumentation, 2014, Changsha/Zhangjiajie, China

Abstract

A grating encoder, which is composed of two equal periodic planar gratings, is proposed for measuring wide range three-axis displacements with nanometric resolution. In the optical reading system, one grating works as a reference planar grating, while another one is a scale planar grating. The grating encoder records the x- and y-axis displacement information in terms of the grating period, while it records the z-axis displacement information in terms of both the wavelength of the laser and the grating period. In this scheme, the gratings and other optical elements satisfy the Littrow configuration. The positions and the size of the detected interference zones are almost constant when the scale grating moves along the z-axis with respect to the optical reading system. Therefore, the measurement range is greatly enhanced in the z-axis direction. When the wavelength of the laser is 632.8 nm and the scale grating with period 8 μm is 100×100 mm², the measured maximal z-axis displacement of the proposed encoder is 1263 mm theoretically.

Citation Download Citation

Jie Lin, Jian Guan, Feng Wen, Jun Luo, and Peng Jin "Grating encoder for wide range three-axis displacement measurement ", Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 944602 (6 March 2015); https://doi.org/10.1117/12.2082475

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available