Active angular alignment of gauge block in double-ended interferometer for its calibration

Zdenĕk Buchta; Martin Šarbort; Šimon Řeřucha; Václav Hucl; Martin Čížek; Josef Lazar; Ondřej Číp

doi:10.1117/12.2070514

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6 January 2015 Active angular alignment of gauge block in double-ended interferometer for its calibration

Zdenĕk Buchta, Martin Šarbort, Šimon Řeřucha, Václav Hucl, Martin Čížek, Josef Lazar, Ondřej Číp

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Proceedings Volume 9450, Photonics, Devices, and Systems VI; 94500H (2015) https://doi.org/10.1117/12.2070514
Event: Photonics Prague 2014, 2014, Prague, Czech Republic

Abstract

This paper presents a method for active angular alignment of gauge block implemented in a system for automatic contactless calibration of gauge blocks designed at ISI ASCR. The system combines low-coherence interferometry and laser interferometry, where the first identifies the gauge block sides position and the second one measures the gauge block length itself. A crucial part of the system is the algorithm for gauge block alignment to the measuring beam which is able to compensate the gauge block lateral and longitudinal tilt up to 0.141 mrad. The algorithm is also important for the gauge block position monitoring during its length measurement.

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Zdenĕk Buchta, Martin Šarbort, Šimon Řeřucha, Václav Hucl, Martin Čížek, Josef Lazar, and Ondřej Číp "Active angular alignment of gauge block in double-ended interferometer for its calibration", Proc. SPIE 9450, Photonics, Devices, and Systems VI, 94500H (6 January 2015); https://doi.org/10.1117/12.2070514

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