A novel absolute measurement for the low-frequency figure correction of aspheric surfaces

Wei-Cheng Lin; Shenq-Tsong Chang; Cheng-Fang Ho; Ching-Hsiang Kuo; Chien-Kai Chung; Wei-Yao Hsu; Shih-Feng Tseng; Cheng-Kuo Sung

doi:10.1117/12.2189408

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17 July 2015 A novel absolute measurement for the low-frequency figure correction of aspheric surfaces

Wei-Cheng Lin, Shenq-Tsong Chang, Cheng-Fang Ho, Ching-Hsiang Kuo, Chien-Kai Chung, Wei-Yao Hsu, Shih-Feng Tseng, Cheng-Kuo Sung

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Proceedings Volume 9524, International Conference on Optical and Photonic Engineering (icOPEN 2015); 952417 (2015) https://doi.org/10.1117/12.2189408
Event: International Conference on Optical and Photonic Engineering (icOPEN2015), 2015, Singapore, Singapore

Abstract

This study proposes an absolute measurement method with a computer-generated hologram (CGHs) to assist the identification of manufacturing form error, and gravity and mounting resulted distortions for a 300 mm aspherical mirror. This method adopts the frequency of peaks and valleys of each Zernike coefficient grabbed by the measurement with various orientations of the mirror in horizontal optical-axis configuration. In addition, the rotational-symmetric aberration (spherical aberration) is calibrated with random ball test method. According to the measured absolute surface figure, a high accuracy aspherical surface with peak to valley (P-V) value of 1/8 wave @ 632.8 nm was fabricated after surface figure correction with the reconstructed error map.

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Wei-Cheng Lin, Shenq-Tsong Chang, Cheng-Fang Ho, Ching-Hsiang Kuo, Chien-Kai Chung, Wei-Yao Hsu, Shih-Feng Tseng, and Cheng-Kuo Sung "A novel absolute measurement for the low-frequency figure correction of aspheric surfaces", Proc. SPIE 9524, International Conference on Optical and Photonic Engineering (icOPEN 2015), 952417 (17 July 2015); https://doi.org/10.1117/12.2189408

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