Ultra-precision optical metrology using highly controlled fiber-based frequency combs

Kaoru Minoshima; Yoshiaki Nakajima; Guanhao Wu

doi:10.1117/12.2191131

22 June 2015 Ultra-precision optical metrology using highly controlled fiber-based frequency combs

Kaoru Minoshima, Yoshiaki Nakajima, Guanhao Wu

Proceedings Volume 9525, Optical Measurement Systems for Industrial Inspection IX; 952502 (2015) https://doi.org/10.1117/12.2191131
Event: SPIE Optical Metrology, 2015, Munich, Germany

Abstract

Optical Frequency combs can be used as a tool for fully controlling the phase and frequency information of light waves, i.e., “optical synthesizer”. It provides powerful tools not only in frequency metrology as “ultraprecise frequency ruler” but also in broad area since light wave can be used to its full extent with an extremely wide dynamic range. Frequency-traceable length measurement using frequency combs provides direct realization of the definition of meter, remote calibration using a GPS technology, and precise measurements of wide range of lengths by taking advantage of high dynamic range in frequency measurements. In this paper, ultrahigh-precision length metrology using fiber-based optical frequency combs are presented. By precisely controlling the frequency and phase of the combs, self-correction of air refractive index and noise cancellation in fiber path in interferometer are demonstrated. Heterodyne interferometry of 61- m path-length based on two-color optical frequency combs is developed for air-refractive-index correction. Measured two-color optical-path-differences agreed with calculations with 10⁻¹¹for 10-hour. Corrected distance variation agreed with thermal expansion of base-plate. A fiber-based optical frequency comb interferometer with 168-m-length reference path was stabilized to nm-level with fiber noise cancellation technique using a single frequency CW laser. Extremely wide range interferometric fringe scanning of 3.3-m path length

Citation Download Citation

Kaoru Minoshima, Yoshiaki Nakajima, and Guanhao Wu "Ultra-precision optical metrology using highly controlled fiber-based frequency combs", Proc. SPIE 9525, Optical Measurement Systems for Industrial Inspection IX, 952502 (22 June 2015); https://doi.org/10.1117/12.2191131

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