Uncertainty reduction of light spot angular position estimation in optical measurement system based on quadrant photodiode

Evgeny G. Lebedko; Kirill V. Trifonov

doi:10.1117/12.2184623

22 June 2015 Uncertainty reduction of light spot angular position estimation in optical measurement system based on quadrant photodiode

Evgeny G. Lebedko, Kirill V. Trifonov

Author Affiliations +

Proceedings Volume 9525, Optical Measurement Systems for Industrial Inspection IX; 95253A (2015) https://doi.org/10.1117/12.2184623
Event: SPIE Optical Metrology, 2015, Munich, Germany

Abstract

Systems based on quadrant photodiode can be used for solving different angular position measurement tasks. But such systems have accuracy problems. Solving these accuracy problems makes systems based on quadrant photodiode applicable for different industrial inspection processes such as positioning and pointing systems and interferometer experiments. For example angular drift in a laser beam can be a serious concern in interferometer experiments where anomalous fringe shifts can be caused by such drift.

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Evgeny G. Lebedko and Kirill V. Trifonov "Uncertainty reduction of light spot angular position estimation in optical measurement system based on quadrant photodiode", Proc. SPIE 9525, Optical Measurement Systems for Industrial Inspection IX, 95253A (22 June 2015); https://doi.org/10.1117/12.2184623

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