Measurement of plasma parameter in Dielectric Barrier Discharge (DBD) by Moiré deflectometry technique

Fatemeh Salimi Meidanshahi; Khosro Madanipour; Babak Shokri; Mohammad Reza Khani; Hamid Razavi Borzoki

doi:10.1117/12.2184853

22 June 2015 Measurement of plasma parameter in Dielectric Barrier Discharge (DBD) by Moiré deflectometry technique

Fatemeh Salimi Meidanshahi, Khosro Madanipour, Babak Shokri, Mohammad Reza Khani, Hamid Razavi Borzoki

Proceedings Volume 9525, Optical Measurement Systems for Industrial Inspection IX; 952545 (2015) https://doi.org/10.1117/12.2184853
Event: SPIE Optical Metrology, 2015, Munich, Germany

Abstract

In this work it is shown that the refractive index and temperature distribution of atmospheric Dielectric Barrier Discharge (DBD) plasmas are measured by Moiré deflectometry. Fringe analysis is used to calculate Moiré deflection and to evaluate refractive index in different points of plasma. By Sa-Ha equation and considering the first ionization, the dependence of refractive index and temperature, electrons, ions and molecules number densities of DBD plasma is obtained. By knowing this relation between plasma parameters, the spatial distributions of the plasma refractive index and temperature are evaluated. The advantages of this method are: simplicity, non-contact, non-destructive measurement, low cost, high accuracy and direct measurement of refractive index gradient.

Citation Download Citation

Fatemeh Salimi Meidanshahi, Khosro Madanipour, Babak Shokri, Mohammad Reza Khani, and Hamid Razavi Borzoki "Measurement of plasma parameter in Dielectric Barrier Discharge (DBD) by Moiré deflectometry technique", Proc. SPIE 9525, Optical Measurement Systems for Industrial Inspection IX, 952545 (22 June 2015); https://doi.org/10.1117/12.2184853

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