Dynamic stitching interferometric testing for large optical plane

Xin Wu; Te Qi; Linna Zhang; Yingjie Yu

doi:10.1117/12.2188111

21 June 2015 Dynamic stitching interferometric testing for large optical plane

Xin Wu, Te Qi, Linna Zhang, Yingjie Yu

Proceedings Volume 9526, Modeling Aspects in Optical Metrology V; 952614 (2015) https://doi.org/10.1117/12.2188111
Event: SPIE Optical Metrology, 2015, Munich, Germany

Abstract

Accurate and efficient measurement method is necessary to improve the testing efficiency for large optical plane. In this paper, a system is proposed for testing large optical plane in the workshop which combined dynamic interferometry with stitching algorithm. The feasibility is vibrated by an optical flat with 200mm×300mm.

Citation Download Citation

Xin Wu, Te Qi, Linna Zhang, and Yingjie Yu "Dynamic stitching interferometric testing for large optical plane", Proc. SPIE 9526, Modeling Aspects in Optical Metrology V, 952614 (21 June 2015); https://doi.org/10.1117/12.2188111

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