Phase-Measuring Interferometry: Performance Characterization And Calibration

H.Philip Stahl; Jay A. Tome

doi:10.1117/12.947576

16 January 1989 Phase-Measuring Interferometry: Performance Characterization And Calibration

H.Philip Stahl, Jay A. Tome

Proceedings Volume 0954, Optical Testing and Metrology II; (1989) https://doi.org/10.1117/12.947576
Event: SPIE International Symposium on Optical Engineering and Industrial Sensing for Advance Manufacturing Technologies, 1988, Dearborn, MI, United States

Abstract

Performance parameters describe a phase-measuring interferometer's system operating conditions, its ability to acquire information in a given testing environment, and the quality of that information. This paper presents a review of these parameters, their definitions and quantification. Additionally, a self-referencing technique is presented for the absolute calibration and removal of an interferometer reference wavefront signature.

Citation Download Citation

H.Philip Stahl and Jay A. Tome "Phase-Measuring Interferometry: Performance Characterization And Calibration", Proc. SPIE 0954, Optical Testing and Metrology II, (16 January 1989); https://doi.org/10.1117/12.947576

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