All-polymer based fabrication process for an all-polymer flexible and parallel optical interconnect

Jilin Yang; Tao Ge; Chris Summitt; Sunglin Wang; Tom Milster; Yuzuru Takashima

doi:10.1117/12.2187143

20 August 2015 All-polymer based fabrication process for an all-polymer flexible and parallel optical interconnect

Jilin Yang, Tao Ge, Chris Summitt, Sunglin Wang, Tom Milster, Yuzuru Takashima

Proceedings Volume 9556, Nanoengineering: Fabrication, Properties, Optics, and Devices XII; 95560F (2015) https://doi.org/10.1117/12.2187143
Event: SPIE Nanoscience + Engineering, 2015, San Diego, California, United States

Abstract

We proposed and demonstrated a new all-polymer based fabrication process for an all-polymer flexible and parallel optical interconnect cable in which a vertical light coupler is integrated. The approach potentially cut down the cost by eliminating a metallization process for alignment of multiple masks. Throughout the process we used a polyimide as the substrate, coated by Epoclad as claddings, then AP2210B and WPR 5100 were used to fabricate waveguides and 45 degree mirror couplers, respectively. In addition, precisely aligned mirror couplers to waveguides are achieved by using polymer-based, non-metallic, and transparent phase-based alignment marks. We tested a feature specific phase-based alignment system. In addition, the shape and depth of the phase-based alignment marks are optimized for phase contrast and Schlieren imaging. Our results shows that a contrast of the image is enhanced compared to that of observed by a conventional imaging system. Such process enables to integrate polymer based waveguides by only using the polymer based alignment marks on the WPR 5100 layer.

Conference Presentation

Citation Download Citation

Jilin Yang, Tao Ge, Chris Summitt, Sunglin Wang, Tom Milster, and Yuzuru Takashima "All-polymer based fabrication process for an all-polymer flexible and parallel optical interconnect", Proc. SPIE 9556, Nanoengineering: Fabrication, Properties, Optics, and Devices XII, 95560F (20 August 2015); https://doi.org/10.1117/12.2187143

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available