Microwave plasma chemical synthesis of nanocrystalline carbon film structures and study their properties

N. Bushuev; R. Yafarov; V. Timoshenkov; S. Orlov; D. Starykh

doi:10.1117/12.2188105

20 August 2015 Microwave plasma chemical synthesis of nanocrystalline carbon film structures and study their properties

N. Bushuev, R. Yafarov, V. Timoshenkov, S. Orlov, D. Starykh

Proceedings Volume 9558, Nanostructured Thin Films VIII; 955811 (2015) https://doi.org/10.1117/12.2188105
Event: SPIE Nanoscience + Engineering, 2015, San Diego, California, United States

Abstract

The self-organization effect of diamond nanocrystals in polymer-graphite and carbon films is detected. The carbon materials deposition was carried from ethanol vapors out at low pressure using a highly non-equilibrium microwave plasma. Deposition processes of carbon film structures (diamond, graphite, graphene) is defined. Deposition processes of nanocrystalline structures containing diamond and graphite phases in different volume ratios is identified. The solid film was obtained under different conditions of microwave plasma chemical synthesis. We investigated the electrical properties of the nanocrystalline carbon films and identified it's from various factors. Influence of diamond-graphite film deposition mode in non-equilibrium microwave plasma at low pressure on emission characteristics was established. This effect is justified using the cluster model of the structure of amorphous carbon. It was shown that the reduction of bound hydrogen in carbon structures leads to a decrease in the threshold electric field of emission from 20-30 V/m to 5 V/m. Reducing the operating voltage field emission can improve mechanical stability of the synthesized film diamond-graphite emitters. Current density emission at least 20 A/cm² was obtained. Nanocrystalline carbon film materials can be used to create a variety of functional elements in micro- and nanoelectronics and photonics such as cold electron source for emission in vacuum devices, photonic devices, cathodoluminescent flat display, highly efficient white light sources. The obtained graphene carbon net structure (with a net size about 6 μm) may be used for the manufacture of large-area transparent electrode for solar cells and cathodoluminescent light sources

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N. Bushuev, R. Yafarov, V. Timoshenkov, S. Orlov, and D. Starykh "Microwave plasma chemical synthesis of nanocrystalline carbon film structures and study their properties", Proc. SPIE 9558, Nanostructured Thin Films VIII, 955811 (20 August 2015); https://doi.org/10.1117/12.2188105

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KEYWORDS

Carbon

Plasma

Microwave radiation

Diamond

Bioalcohols

Graphene

Deposition processes

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