Sol-gel deposition and plasma treatment of intrinsic, aluminum-doped, and gallium-doped zinc oxide thin films as transparent conductive electrodes

Zhaozhao Zhu; Trent Mankowski; Kaushik Balakrishnan; Ali Sehpar Shikoh; Farid Touati; Mohieddine A. Benammar; Masud Mansuripur; Charles M. Falco

doi:10.1117/12.2186144

5 September 2015 Sol-gel deposition and plasma treatment of intrinsic, aluminum-doped, and gallium-doped zinc oxide thin films as transparent conductive electrodes

Zhaozhao Zhu, Trent Mankowski, Kaushik Balakrishnan, Ali Sehpar Shikoh, Farid Touati, Mohieddine A. Benammar, Masud Mansuripur, Charles M. Falco

Author Affiliations +

Proceedings Volume 9561, Thin Films for Solar and Energy Technology VII; 956109 (2015) https://doi.org/10.1117/12.2186144
Event: SPIE Optics + Photonics for Sustainable Energy, 2015, San Diego, California, United States

Abstract

Zinc oxide and aluminum/gallium-doped zinc oxide thin films were deposited via sol-gel spin-coating technique. Employing plasma treatment as alternative to post thermal annealing, we found that the morphologies of these thin films have changed and the sheet resistances have been significantly enhanced. These plasma-treated thin films also show very good optical properties, with transmittance above 90% averaged over the visible wavelength range. Our best aluminum/gallium-doped zinc oxide thin films exhibit sheet resistances (R_s) of ~ 200 Ω/sq and ~ 150 Ω/sq, respectively.

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Zhaozhao Zhu, Trent Mankowski, Kaushik Balakrishnan, Ali Sehpar Shikoh, Farid Touati, Mohieddine A. Benammar, Masud Mansuripur, and Charles M. Falco "Sol-gel deposition and plasma treatment of intrinsic, aluminum-doped, and gallium-doped zinc oxide thin films as transparent conductive electrodes", Proc. SPIE 9561, Thin Films for Solar and Energy Technology VII, 956109 (5 September 2015); https://doi.org/10.1117/12.2186144

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