3D interferometric microscope: color visualization of engineered surfaces for industrial applications

Joanna Schmit; Matt Novak; Son Bui

doi:10.1117/12.2190352

1 September 2015 3D interferometric microscope: color visualization of engineered surfaces for industrial applications

Joanna Schmit, Matt Novak, Son Bui

Proceedings Volume 9576, Applied Advanced Optical Metrology Solutions; 957607 (2015) https://doi.org/10.1117/12.2190352
Event: SPIE Optical Engineering + Applications, 2015, San Diego, California, United States

Abstract

3D microscopes based on white light interference (WLI) provide precise measurement for the topography of engineering surfaces. However, the display of an object in its true colors as observed under white illumination is often desired; this traditionally has presented a challenge for WLI-based microscopes. Such 3D color display is appealing to the eye and great for presentations, and also provides fast evaluation of certain characteristics like defects, delamination, or deposition of different materials. Determination of color as observed by interferometric objectives is not straightforward; we will present how color imaging capabilities similar to an ordinary microscope can be obtained in interference microscopes based on WLI and we will give measurement and imaging examples of a few industrial samples.

Citation Download Citation

Joanna Schmit, Matt Novak, and Son Bui "3D interferometric microscope: color visualization of engineered surfaces for industrial applications", Proc. SPIE 9576, Applied Advanced Optical Metrology Solutions, 957607 (1 September 2015); https://doi.org/10.1117/12.2190352

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