Research on model identification of ultra-precision motion stage

Sheng Qiang; Bin Wang

doi:10.1117/12.2185797

23 September 2015 Research on model identification of ultra-precision motion stage

Sheng Qiang, Bin Wang

Proceedings Volume 9577, Optical Modeling and Performance Predictions VII; 957706 (2015) https://doi.org/10.1117/12.2185797
Event: SPIE Optical Engineering + Applications, 2015, San Diego, California, United States

Abstract

Analyzing the structure of precision motion platform, building mathematical model of linear motors and voice coil motors, thereby macro-micro coupling theoretical models and mechanical model are established, which can reflect the combined effect of multiple motors motion characteristics. The unknown parameters of the macro-micro coupling theoretical model are identified by adaptive real-coded genetic algorithm. Validity of the precision motion platform model has been verified by simulations.

Citation Download Citation

Sheng Qiang and Bin Wang "Research on model identification of ultra-precision motion stage", Proc. SPIE 9577, Optical Modeling and Performance Predictions VII, 957706 (23 September 2015); https://doi.org/10.1117/12.2185797

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