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23 September 2015 Optomechanical analysis of diffractive optical elements
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Abstract
Diffractive optical elements are important components to many high precision optical systems. When such systems are subjected to mechanical loading these optical components yield performance degradation contributions quite different from non-diffractive optical components. It is of interest to predict by analysis such performance degradations for the purposes of development of the optomechanical design for relevant optical systems. The developments of this paper are to characterize the changes in phase due to such deformations as predicted by the finite element method and represent them in optical analysis alongside characterizations of surface shape changes.
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Gregory J. Michels and Victor L. Genberg "Optomechanical analysis of diffractive optical elements", Proc. SPIE 9577, Optical Modeling and Performance Predictions VII, 95770B (23 September 2015); https://doi.org/10.1117/12.2189292
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