Employing partially coherent, compact gas-discharge sources for coherent diffractive imaging with extreme ultraviolet light

J. Bußmann; M. Odstrčil; R. Bresenitz; D. Rudolf; Jianwei Miao; W. S. Brocklesby; D. Grützmacher; L. Juschkin

doi:10.1117/12.2187852

22 September 2015 Employing partially coherent, compact gas-discharge sources for coherent diffractive imaging with extreme ultraviolet light

J. Bußmann, M. Odstrčil, R. Bresenitz, D. Rudolf, Jianwei Miao, W. S. Brocklesby, D. Grützmacher, L. Juschkin

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Proceedings Volume 9589, X-Ray Lasers and Coherent X-Ray Sources: Development and Applications XI; 95890L (2015) https://doi.org/10.1117/12.2187852
Event: SPIE Optical Engineering + Applications, 2015, San Diego, California, United States

Abstract

Coherent diffractive imaging (CDI) and related techniques enable a new type of diffraction-limited high-resolution extreme ultraviolet (EUV) microscopy. Here, we demonstrate CDI reconstruction of a complex valued object under illumination by a compact gas-discharge EUV light source emitting at 17.3 nm (O VI spectral line). The image reconstruction method accounts for the partial spatial coherence of the radiation and allows imaging even with residual background light. These results are a first step towards laboratory-scale CDI with a gas-discharge light source for applications including mask inspection for EUV lithography, metrology and astronomy.

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J. Bußmann, M. Odstrčil, R. Bresenitz, D. Rudolf, Jianwei Miao, W. S. Brocklesby, D. Grützmacher, and L. Juschkin "Employing partially coherent, compact gas-discharge sources for coherent diffractive imaging with extreme ultraviolet light ", Proc. SPIE 9589, X-Ray Lasers and Coherent X-Ray Sources: Development and Applications XI, 95890L (22 September 2015); https://doi.org/10.1117/12.2187852

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