Paper
22 September 2015 Soft x-ray source based on the high-current capillary-discharge system
Jiri Schmidt, Karel Kolacek, Oleksandr Frolov, Jaroslav Straus, Andrei Choukourov
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Abstract
This paper reports on the experimental results of interaction of focused XUV laser beam (wavelength 46.9 nm) with Polymethylmethacrylate (PMMA) sample. Laser-beam footprints in the region near the tangential focus of spherical mirror with/without multi-layer reflecting coating are presented and discussed. Reflection coefficients of these two spherical mirrors are published as well.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jiri Schmidt, Karel Kolacek, Oleksandr Frolov, Jaroslav Straus, and Andrei Choukourov "Soft x-ray source based on the high-current capillary-discharge system", Proc. SPIE 9589, X-Ray Lasers and Coherent X-Ray Sources: Development and Applications XI, 958911 (22 September 2015); https://doi.org/10.1117/12.2187734
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KEYWORDS
Mirrors

Extreme ultraviolet

Capillaries

Polymethylmethacrylate

Spherical lenses

Coating

Reflectivity

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