Fabrication and x-ray testing of true kinoform lenses with high efficiencies

Kahraman Keskinbora; Umut Tunca Sanli; Corinne Grévent; Gisela Schütz

doi:10.1117/12.2187896

18 September 2015 Fabrication and x-ray testing of true kinoform lenses with high efficiencies

Kahraman Keskinbora, Umut Tunca Sanli, Corinne Grévent, Gisela Schütz

Proceedings Volume 9592, X-Ray Nanoimaging: Instruments and Methods II; 95920H (2015) https://doi.org/10.1117/12.2187896
Event: SPIE Optical Engineering + Applications, 2015, San Diego, California, United States

Abstract

Kinoform lenses are focusing optics with a 100 % theoretical focusing efficiency. Up to date, the actual continuous 3D surface relief profiles of X-ray kinoform lenses could only be approximately fabricated. Now, we have come up with an effective ion beam lithography fabrication strategy producing first-ever imaging-quality circularly symmetric kinoform lenses which demonstrated reasonably high focusing efficiencies. Here, we will discuss the potential of the fabrication method and the utility of kinoform lenses enabled by it. Special emphases will be placed on materials development including selection and design, efficiency considerations for various energies and possible applications.

Citation Download Citation

Kahraman Keskinbora, Umut Tunca Sanli, Corinne Grévent, and Gisela Schütz "Fabrication and x-ray testing of true kinoform lenses with high efficiencies", Proc. SPIE 9592, X-Ray Nanoimaging: Instruments and Methods II, 95920H (18 September 2015); https://doi.org/10.1117/12.2187896

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