Development of a deflectometer for accurate surface figure metrology

Mikhail V. Gubarev; Brian Ramsey; Carolyn Atkins; Andrew Eberhardt

doi:10.1117/12.2190026

23 September 2015 Development of a deflectometer for accurate surface figure metrology

Mikhail V. Gubarev, Brian Ramsey, Carolyn Atkins, Andrew Eberhardt

Proceedings Volume 9603, Optics for EUV, X-Ray, and Gamma-Ray Astronomy VII; 96031T (2015) https://doi.org/10.1117/12.2190026
Event: SPIE Optical Engineering + Applications, 2015, San Diego, California, United States

Abstract

Marshall Space Flight Center is developing a direct fabrication technique in which high resolution x-ray optics are fabricated through surface polishing and figuring of a full-shell substrate. The use of a computer controlled polishing machine leads to quick convergence to high resolution mirrors. The vailability of an in situ surface figure metrology technique would permit even higher convergence rates and reduce the surface profile errors associated with installation and re-alignment of the x-ray mirror shell between the metrology and polishing processes. A surface-figure-metrology instrument based on an optical deflectometer scheme is under development at the Marshall Space Flight Center (MSFC). The current status of the deflectometer instrument development is presented here.

Citation Download Citation

Mikhail V. Gubarev, Brian Ramsey, Carolyn Atkins, and Andrew Eberhardt "Development of a deflectometer for accurate surface figure metrology", Proc. SPIE 9603, Optics for EUV, X-Ray, and Gamma-Ray Astronomy VII, 96031T (23 September 2015); https://doi.org/10.1117/12.2190026

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