Paper
10 August 2015 Fabry-Perot interferometer based on etched side-hole fiber for microfluidic refractive index sensing
Shengnan Wu, Guofeng Yan, Bin Zhou, Sailing He
Author Affiliations +
Proceedings Volume 9620, 2015 International Conference on Optical Instruments and Technology: Optical Sensors and Applications; 962005 (2015) https://doi.org/10.1117/12.2193322
Event: International Conference on Optical Instruments and Technology 2015, 2015, Beijing, China
Abstract
In this paper, we present a novel fiber-optic open-cavity Fabry-Perot interferometer (FPI), which is specially designed for microfluidic refractive index (RI) sensing. An etching Side-hole fiber (SHF) was sandwiched between in two single-mode-fibers (SMF) and then a cavity was opened up by chemical etching method in the SHF. The minute order of the etching process endow such FPIs with low cost and ease of fabrication. For further microfluidic sensing test, the FPI was integrated with a cross microfluidic slit that was fabricated through photolithography. The refractive index response of the FPI was characterized using sodium hydroxide solution with RI range from 1.3400 to 1.3470. Experimental results show that FPIs with different length of open-cavity have the similar liner RI response with different RI sensitivities. The optimal RI sensitivity of more than 1138 nm/RI can be achieved with open-cavity length of 56 μm. The temperature response was also investigated, which shows that FPIs exhibit a very low temperature cross-sensitivities of 4.00 pm/ °C and 1.95 pm/ °C corresponding FPIs with cavity length of 123 μm and 56 μm, respectively. Such good performance renders the FPI a promising in-line microfluidic sensor for temperature-insensitive RI sensing.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Shengnan Wu, Guofeng Yan, Bin Zhou, and Sailing He "Fabry-Perot interferometer based on etched side-hole fiber for microfluidic refractive index sensing", Proc. SPIE 9620, 2015 International Conference on Optical Instruments and Technology: Optical Sensors and Applications, 962005 (10 August 2015); https://doi.org/10.1117/12.2193322
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KEYWORDS
Microfluidics

Refractive index

Etching

Single mode fibers

Fabry–Perot interferometry

Temperature metrology

Scanning electron microscopy

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