Mechanical stresses of the designed dispersive mirror (DM) caused the substrate bending that distorts wave front quality resulting in the distorting of the beam waveform of laser system. In order to compensate this mechanical stress, the substrate back side was covered by an antireflection coating providing the lowest possible reflection in the working spectral range, having the total physical thickness close to DM thickness and total thicknesses of Nb2O5/SiO2 layers close to the corresponding total thicknesses of Nb2O5/SiO2 in DM. The produced DM-AR optical element exhibits excellent spectral properties.
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