How reduced vacuum pumping capability in a coating chamber affects the laser damage resistance of HfO[sub]2[/sub]/SiO[sub]2[/sub] antireflection and high-reflection coatings

Ella S. Field; John C. Bellum; Damon E. Kletecka

doi:10.1117/12.2194131

23 November 2015 How reduced vacuum pumping capability in a coating chamber affects the laser damage resistance of HfO₂/SiO₂ antireflection and high-reflection coatings

Ella S. Field, John C. Bellum, Damon E. Kletecka

Author Affiliations +

Proceedings Volume 9632, Laser-Induced Damage in Optical Materials: 2015; 963219 (2015) https://doi.org/10.1117/12.2194131
Event: SPIE Laser Damage, 2015, Boulder, Colorado, United States

Abstract

Optical coatings with the highest laser damage thresholds rely on clean conditions in the vacuum chamber during the coating deposition process. A low base pressure in the coating chamber, as well as the ability of the vacuum system to maintain the required pressure during deposition, are important aspects of limiting the amount of defects in an optical coating that could induce laser damage. Our large optics coating chamber at Sandia National Laboratories normally relies on three cryo pumps to maintain low pressures for e-beam coating processes. However, on occasion, one or more of the cryo pumps have been out of commission. In light of this circumstance, we decided to explore how deposition under compromised vacuum conditions resulting from the use of only one or two cryo pumps affects the laser-induced damage thresholds of optical coatings. The coatings of this study consist of HfO₂ and SiO₂ layer materials and include antireflection coatings for 527 nm at normal incidence, and high reflection coatings for 527 nm, 45° angle of incidence (AOI), in P-polarization (P-pol).

Citation Download Citation

Ella S. Field, John C. Bellum, and Damon E. Kletecka "How reduced vacuum pumping capability in a coating chamber affects the laser damage resistance of HfO₂/SiO₂ antireflection and high-reflection coatings", Proc. SPIE 9632, Laser-Induced Damage in Optical Materials: 2015, 963219 (23 November 2015); https://doi.org/10.1117/12.2194131

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