Phase imaging results of phase defect using micro coherent EUV scatterometry microscope

Tetsuo Harada; Hiraku Hashimoto; Tsuyoshi Amano; Hiroo Kinoshita; Takeo Watanabe

doi:10.1117/12.2205304

9 November 2015 Phase imaging results of phase defect using micro coherent EUV scatterometry microscope

Tetsuo Harada, Hiraku Hashimoto, Tsuyoshi Amano, Hiroo Kinoshita, Takeo Watanabe

Proceedings Volume 9635, Photomask Technology 2015; 96351E (2015) https://doi.org/10.1117/12.2205304
Event: SPIE Photomask Technology, 2015, Monterey, California, United States

Abstract

To evaluate defects on extreme ultraviolet (EUV) masks at the blank state of manufacturing, we developed a micro coherent EUV scatterometry microscope (micro-CSM). The illumination source is coherent EUV light with a 140-nm focus diameter on the defect using a Fresnel zoneplate. This system directly observes the reflection and diffraction signals from a phase defect. The phase and the intensity image of the defect is reconstructed with the diffraction images using ptychography, which is an algorithm of the coherent diffraction imaging. We observed programmed phase defect on a blank EUV mask. Phase distributions of these programmed defect were well reconstructed quantitatively. The micro-CSM is very powerful tool to review an EUV phase defect.

Citation Download Citation

Tetsuo Harada, Hiraku Hashimoto, Tsuyoshi Amano, Hiroo Kinoshita, and Takeo Watanabe "Phase imaging results of phase defect using micro coherent EUV scatterometry microscope", Proc. SPIE 9635, Photomask Technology 2015, 96351E (9 November 2015); https://doi.org/10.1117/12.2205304

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