Improvement in topology measurement accuracy of atomic force microscope using additional sensor

Yeomin Yoon; Jiseong Jeong; Junsup Kim; Kyihwan Park

doi:10.1117/12.2184430

1 July 2015 Improvement in topology measurement accuracy of atomic force microscope using additional sensor

Yeomin Yoon, Jiseong Jeong, Junsup Kim, Kyihwan Park

Proceedings Volume 9655, Fifth Asia-Pacific Optical Sensors Conference; 96550K (2015) https://doi.org/10.1117/12.2184430
Event: Fifth Asia Pacific Optical Sensors Conference, 2015, Jeju, Korea, Republic of

Abstract

The topology image of an atomic force microscope is obtained by picking up a controlled output of a force-feedback loop that is proportional to the height of a sample under the assumption that no dynamics in a z-axis actuator exist. However, the dynamic effects such as hysteresis and creep in a PZT driving z-axis actuator cannot be ignored. To solve this problem, a strain-gage sensor is used as an additional sensor, which enables measurement of the absolute displacement of a z-axis PZT nano scanner. The advantage of using an additional sensor is experimentally provided and validated in topology images.

Citation Download Citation

Yeomin Yoon, Jiseong Jeong, Junsup Kim, and Kyihwan Park "Improvement in topology measurement accuracy of atomic force microscope using additional sensor", Proc. SPIE 9655, Fifth Asia-Pacific Optical Sensors Conference, 96550K (1 July 2015); https://doi.org/10.1117/12.2184430

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available