Method for the measurement of surface-relief grating’s profile using initial phase of diffraction wave

Fanrong Feng; Jianhong Wu; Fei Gao

doi:10.1117/12.2197989

6 November 2015 Method for the measurement of surface-relief grating’s profile using initial phase of diffraction wave

Fanrong Feng, Jianhong Wu, Fei Gao

Proceedings Volume 9667, International Workshop on Thin Films for Electronics, Electro-Optics, Energy, and Sensors; 96670B (2015) https://doi.org/10.1117/12.2197989
Event: International Workshop on Thin Films for Electronics, Electro-Optics, Energy and Sensors, 2015, Suzhou, China

Abstract

The analysis of initial phase of diffraction wave of grating mask is based on rigorous coupled-wave analysis method. In this paper, the general diffraction analysis numerical code based on the rigorous coupled-wave analysis (RCWA) is written by MATLAB software to calculate the 0^th refraction wave of grating mask. Since large measurement errors will occur while measuring the grove shape by AFM, the method of measuring the initial phase of diffraction wave was proposed and the feasibility of this method has also been verified.

Citation Download Citation

Fanrong Feng, Jianhong Wu, and Fei Gao "Method for the measurement of surface-relief grating’s profile using initial phase of diffraction wave", Proc. SPIE 9667, International Workshop on Thin Films for Electronics, Electro-Optics, Energy, and Sensors, 96670B (6 November 2015); https://doi.org/10.1117/12.2197989

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