Evaluation of additive element to improve PZT piezoelectricity by using first-principles calculation

Yutaka Yasoda; Yasutomo Uetsuji; Kazuyoshi Tsuchiya

doi:10.1117/12.2202407

22 December 2015 Evaluation of additive element to improve PZT piezoelectricity by using first-principles calculation

Yutaka Yasoda, Yasutomo Uetsuji, Kazuyoshi Tsuchiya

Proceedings Volume 9668, Micro+Nano Materials, Devices, and Systems; 96681Y (2015) https://doi.org/10.1117/12.2202407
Event: SPIE Micro+Nano Materials, Devices, and Applications, 2015, Sydney, New South Wales, Australia

Abstract

Recently, piezoelectric material has a very important potential for functional material which configure Bio-MEMS (Biological Micro Electro Mechanical Systems) actuator and sensor. Specifically, in implementation of piezoelectric material for Bio-MEMS, thin film fabrication by sputtering method is made from the viewpoint of miniaturization. Furthermore, in piezoelectric material, perovskite type material composed of ABO3 has a high piezoelectricity. Then, PZT (Lead Zirconate Titanate) as the perovskite type piezoelectric material is widely used since it is easy to produce and has high piezoelectricity. PZT has zirconium or titanium in the B site of ABO3 structure. PZT has the features such as physical properties to greatly change by change in the B site composition ratio of zirconium and titanium. Thus, the B site greatly influences physical properties and therefore function improvement by additive element is tried widely. However, experimental method to lack in economy and quantitativeness is mainstream. Therefore, application of the result is difficult and new evaluation method of B site additive element for sputtering fabrication is necessary. Accordingly, in this research, search of an additive element at low cost and quantitative from the viewpoint of energy by first-principles calculation. First of all, the additive elements which capable of substituting for a B site of PZT were searched. Next, change of piezoelectricity was evaluated by change of crystal structure in a PZT system was introduced an additive element that substitution of the B site was possible. As a result, additive elements for the PZT B site capable of improving piezoelectricity were determined.

Citation Download Citation

Yutaka Yasoda, Yasutomo Uetsuji, and Kazuyoshi Tsuchiya "Evaluation of additive element to improve PZT piezoelectricity by using first-principles calculation", Proc. SPIE 9668, Micro+Nano Materials, Devices, and Systems, 96681Y (22 December 2015); https://doi.org/10.1117/12.2202407

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
6 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Ferroelectric materials

Vanadium

Perovskite

Aluminum

Chemical elements

Anisotropy

Actuators

Show All Keywords

Keywords/Phrases

Search In:

Publication Years