Optical properties of refractory TiN, AlN and (Ti,Al)N coatings

M. Bilokur; A. Gentle; M. Arnold; M. B. Cortie; G. B. Smith

doi:10.1117/12.2202403

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22 December 2015 Optical properties of refractory TiN, AlN and (Ti,Al)N coatings

M. Bilokur, A. Gentle, M. Arnold, M. B. Cortie, G. B. Smith

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Proceedings Volume 9668, Micro+Nano Materials, Devices, and Systems; 96685O (2015) https://doi.org/10.1117/12.2202403
Event: SPIE Micro+Nano Materials, Devices, and Applications, 2015, Sydney, New South Wales, Australia

Abstract

Titanium nitride is a golden-colored semiconductor with metallic optical properties. It is already widely used in room temperature spectrally-selective coatings. In contrast, aluminum nitride is a relatively wide-band gap, non-metallic material. Both nitrides have exceptional thermal stability, to over 1000 °C, but are susceptible to oxidation. We will show here that composite coatings consisting of these materials and their complex oxides have considerable potential for spectrally-selective applications, including at elevated temperatures. In particular, we examine the metastable materials produced by magnetron sputtering. The effective dielectric functions of these materials can be tuned over a wide range by manipulation of their microstructure. This provides a strategy to assemble materials with tunable dielectric functions using a 'bottom-up' approach. The results are compared to those achievable by conventional, 'top-down', planar optical stacks comprised of alternating layers of TiN_x and AlN.

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M. Bilokur, A. Gentle, M. Arnold, M. B. Cortie, and G. B. Smith "Optical properties of refractory TiN, AlN and (Ti,Al)N coatings", Proc. SPIE 9668, Micro+Nano Materials, Devices, and Systems, 96685O (22 December 2015); https://doi.org/10.1117/12.2202403

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