A Small-Angle Scatterometer

Steven J Wein; William L. Wolfe

doi:10.1117/12.948112

5 April 1989 A Small-Angle Scatterometer

Steven J Wein, William L. Wolfe

Proceedings Volume 0967, Stray Light and Contamination in Optical Systems; (1989) https://doi.org/10.1117/12.948112
Event: 32nd Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1988, San Diego, CA, United States

Abstract

The design, analysis, and performance of a small-angle scatterometer are presented. A dye-cell Gaussian apodized aperture is utilized to reduce the small-angle diffraction background. After the diffraction background is sufficiently reduced, the system scatter becomes the dominant noise in the instrument beam profile. The geometrical aberrations are graphically shown to have no significant effect on the higher-order diffraction rings of the beam profile, and as such, an aberrational tolerancing approach can be employed in scatterometer design. Small-angle scattered light measurements are presented for two mirror samples. The associated beam profiles and NEBRDF levels are also given.

Citation Download Citation

Steven J Wein and William L. Wolfe "A Small-Angle Scatterometer", Proc. SPIE 0967, Stray Light and Contamination in Optical Systems, (5 April 1989); https://doi.org/10.1117/12.948112

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