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The design, analysis, and performance of a small-angle scatterometer are presented. A dye-cell Gaussian apodized aperture is utilized to reduce the small-angle diffraction background. After the diffraction background is sufficiently reduced, the system scatter becomes the dominant noise in the instrument beam profile. The geometrical aberrations are graphically shown to have no significant effect on the higher-order diffraction rings of the beam profile, and as such, an aberrational tolerancing approach can be employed in scatterometer design. Small-angle scattered light measurements are presented for two mirror samples. The associated beam profiles and NEBRDF levels are also given.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Steven J Wein and William L. Wolfe "A Small-Angle Scatterometer", Proc. SPIE 0967, Stray Light and Contamination in Optical Systems, (5 April 1989);


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