Study on subsurface damage of optical glass after grinding with free abrasives

Yuzhu Jin; Lingyan Jiao; Yongwei Zhu; Yi Tong

doi:10.1117/12.2243155

28 October 2016 Study on subsurface damage of optical glass after grinding with free abrasives

Yuzhu Jin, Lingyan Jiao, Yongwei Zhu, Yi Tong

Proceedings Volume 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 96831D (2016) https://doi.org/10.1117/12.2243155
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

As a practical engineering device, laser gyro has replaced other types of gyro and become the dominant product of inertial navigation devices, and the mirror substrate is the key part for successful development of laser gyro. Normally, the mirror must have a high reflectivity, for example 99.99% or more, but the premise is that the super smooth surface with the order of Å must be fabricated first 1. In the process of super smooth surface, grinding procedure is a very important step; its quality determines the subsurface damage depth of the mirror. In this paper, based on optical quartz glass as the study object, three different size abrasives are used to grind the blank respectively; then the particle size distribution, surface roughness and microstructure are tested; finally, angle polishing method to measure subsurface damage depth is adopted. Some reasonable theory parameters are obtained through analysis of the test data, also having certain significance for practice.

Citation Download Citation

Yuzhu Jin, Lingyan Jiao, Yongwei Zhu, and Yi Tong "Study on subsurface damage of optical glass after grinding with free abrasives", Proc. SPIE 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 96831D (28 October 2016); https://doi.org/10.1117/12.2243155

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KEYWORDS

Particles

Abrasives

Surface finishing

Glasses

Gyroscopes

Polishing

Mirrors

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