Paper
28 October 2016 Experimental investigation of precision grinding oriented to achieve high process efficiency for large and middle-scale optic
Ping Li, Tan Jin, Zongfu Guo, Ange Lu, Meina Qu
Author Affiliations +
Proceedings Volume 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 968328 (2016) https://doi.org/10.1117/12.2242822
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China
Abstract
High efficiency machining of large precision optical surfaces is a challenging task for researchers and engineers worldwide. The higher form accuracy and lower subsurface damage helps to significantly reduce the cycle time for the following polishing process, save the cost of production, and provide a strong enabling technology to support the large telescope and laser energy fusion projects. In this paper, employing an Infeed Grinding (IG) mode with a rotary table and a cup wheel, a multi stage grinding process chain, as well as precision compensation technology, a Φ300mm diameter plano mirror is ground by the Schneider Surfacing Center SCG 600 that delivers a new level of quality and accuracy when grinding such large flats. Results show a PV form error of Pt<2 μm, the surface roughness Ra<30 nm and Rz<180 nm, with subsurface damage <20 μm, and a material removal rates of up to 383.2 mm3/s.
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ping Li, Tan Jin, Zongfu Guo, Ange Lu, and Meina Qu "Experimental investigation of precision grinding oriented to achieve high process efficiency for large and middle-scale optic", Proc. SPIE 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 968328 (28 October 2016); https://doi.org/10.1117/12.2242822
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KEYWORDS
Surface roughness

Surface finishing

Error analysis

Optics manufacturing

Mirrors

Photovoltaics

Polishing

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