Study on the method of combined uniform removal in fabrication of large aspheric mirror

Wei Zhang; Zhige Zeng; Fan Wu

doi:10.1117/12.2245032

28 October 2016 Study on the method of combined uniform removal in fabrication of large aspheric mirror

Wei Zhang, Zhige Zeng, Fan Wu

Proceedings Volume 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 96832F (2016) https://doi.org/10.1117/12.2245032
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

In the processing of large aspheric mirror, uniform removal means the process of equal removal at the whole surface in grinding and rough polishing stage. It aims to remove the subsurface damage layer at forming and grinding stage. It also smoothes the surface for reducing even eliminating mid-and-high-frequency error on the mirror. The combined processing method is using different diameter of laps by spatial frequency error model of reasonable matching in fabrication of workpiece. In this paper, the uniform removal method of combination NC manipulator and the Computer Controlled Active Lap is used. From the ring removal function model, the processing of combined uniform removal is simulated and analyzed. Compared with the CCAL uniform removal processing, it can get the much better uniform removal effect.

Citation Download Citation

Wei Zhang, Zhige Zeng, and Fan Wu "Study on the method of combined uniform removal in fabrication of large aspheric mirror", Proc. SPIE 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 96832F (28 October 2016); https://doi.org/10.1117/12.2245032

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