A new multi-probe scanning method for measuring optical surface

Dede Zhai; Ziqiang Yin; Shanyong Chen; Fujing Tian

doi:10.1117/12.2243800

27 September 2016 A new multi-probe scanning method for measuring optical surface

Dede Zhai, Ziqiang Yin, Shanyong Chen, Fujing Tian

Proceedings Volume 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment; 96841K (2016) https://doi.org/10.1117/12.2243800
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

In form metrology, multi-probe scanning method based on error separation technique can be used successfully to eliminate motion error of slideway. Due to high repeatability of flexure hinge, a virtual multiple sensor concept is presented. The system employs a single probe with the accurate movement of flexure hinge to achieve virtual multiprobe. This single probe scanning method can realize and extend the function of multiple-probe method. This paper describes the principle of this new method; Measurement process of method is modeled and the predefined test curve is reconstructed by the application of simultaneous equation and least-squares methods. It shows that scanning systems with virtual multiple sensors allow the influence of random and systematic errors to be reduced. We also conducted the experiment repeatedly to measure the profile of workpiece. It shows that reconstructed curves in each experiment are nearly superposed.

Citation Download Citation

Dede Zhai, Ziqiang Yin, Shanyong Chen, and Fujing Tian "A new multi-probe scanning method for measuring optical surface", Proc. SPIE 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment, 96841K (27 September 2016); https://doi.org/10.1117/12.2243800

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KEYWORDS

Sensors

Error analysis

Mathematical modeling

Metrology

Systems modeling

3D metrology

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