New reconstruction algorithm for absolute shape calibration in two-flat test

Yuhang He; Qiang Li; Daoming Wan; Liqun Chai

doi:10.1117/12.2242722

27 September 2016 New reconstruction algorithm for absolute shape calibration in two-flat test

Yuhang He, Qiang Li, Daoming Wan, Liqun Chai

Proceedings Volume 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment; 96842N (2016) https://doi.org/10.1117/12.2242722
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

A new reconstruction algorithm for absolute shape calibration in two-flat test is proposed. The shift-rotation method is applied to absolute shape calibration in two-flat test. Relying on the decomposition of the reconstructed shapes into rotationally asymmetric and symmetric components, an iteration algorithm is presented to reconstruct the rotationally asymmetric components, and Zernike polynomial fitting algorithm is used to calculate rotationally symmetric components. Compared to the traditional algorithms, the proposed algorithm has the characteristics of considerable accuracy and less computational effort. A simulation experiment proves the validity of the presented algorithm.

Citation Download Citation

Yuhang He, Qiang Li, Daoming Wan, and Liqun Chai "New reconstruction algorithm for absolute shape calibration in two-flat test", Proc. SPIE 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment, 96842N (27 September 2016); https://doi.org/10.1117/12.2242722

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