Fabrication and parameters calculation of terahertz detector with resonance cavity structure

Zhiqing Liang; Ziji Liu; Zheng dong Ma; He Yu; Tao Wan; Yadong Jiang

doi:10.1117/12.2242812

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25 October 2016 Fabrication and parameters calculation of terahertz detector with resonance cavity structure

Zhiqing Liang, Ziji Liu, Zheng dong Ma, He Yu, Tao Wan, Yadong Jiang

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Proceedings Volume 9686, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices; 96860N (2016) https://doi.org/10.1117/12.2242812
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

Terahertz (THz) detector indicates great potentials in detecting application because of real-time, compact bulk and unique spectral characteristics. Small dimension and integration THz detectors based on resonance cavity structure were designed and simulated to get optimizing THz detector parameters from the simulation results of membrane temperature changing. The THz detector was fabricated with complex semiconductor process and three dimension thermal variation of resonance cavity were obtained by simulation to identify the resonance cavity design. The electrical response time of THz detector could be as low as 5ms, which is suitable for the application of fast response THz detecting.

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Zhiqing Liang, Ziji Liu, Zheng dong Ma, He Yu, Tao Wan, and Yadong Jiang "Fabrication and parameters calculation of terahertz detector with resonance cavity structure", Proc. SPIE 9686, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices, 96860N (25 October 2016); https://doi.org/10.1117/12.2242812

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