Synthesis and characterization of lithium tantalate thin films fabricated by sol-gel method

Binwei Sun; Dong Pan; Zehua Huang; Jun Wang; Yadong Jiang

doi:10.1117/12.2242862

25 October 2016 Synthesis and characterization of lithium tantalate thin films fabricated by sol-gel method

Binwei Sun, Dong Pan, Zehua Huang, Jun Wang, Yadong Jiang

Proceedings Volume 9686, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices; 968611 (2016) https://doi.org/10.1117/12.2242862
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

Multilayer lithium tantalate thin films have been successfully prepared on Pt/Ti/SiO₂/Si(100) substrate using sol-gel and spin-coating method. Polycrystalline perovskite films were obtained through pyrolysis at 400°C and subsequent calcination at various temperatures from 500°C to 700°C for 1h, which were optimized by means of X-ray diffraction, Raman spectroscopy and thermal analysis. The morphology on the top surface and fractured cross section of LT films was observed by a field-emission scanning electron microscope. The 300 nm thick LT film annealed at 650°C exhibited a dielectric constant of 19.8 and a loss tangent of 0.06 at10KHz.

Citation Download Citation

Binwei Sun, Dong Pan, Zehua Huang, Jun Wang, and Yadong Jiang "Synthesis and characterization of lithium tantalate thin films fabricated by sol-gel method", Proc. SPIE 9686, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices, 968611 (25 October 2016); https://doi.org/10.1117/12.2242862

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