Effects of annealing time on the application of vanadium dioxide films in smart windows

Chunhui Ji; Zhiming Wu; Xuefei Wu; Haoqian Feng; Xueting Ma; Yadong Jiang

doi:10.1117/12.2242821

25 October 2016 Effects of annealing time on the application of vanadium dioxide films in smart windows

Chunhui Ji, Zhiming Wu, Xuefei Wu, Haoqian Feng, Xueting Ma, Yadong Jiang

Proceedings Volume 9686, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices; 968612 (2016) https://doi.org/10.1117/12.2242821
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

Vanadium dioxide (VO₂) films have great potential applications in photoelectric switching, storage devices, terahertz modulators and smart windows, due to the abruptly insulator-metal phase transition (IMT) near room temperature. In this research, vanadium oxide films were deposited by DC reactive magnetron sputtering in different annealing time of 450°C on glass substrates. As for electrical properties, the increasing of annealing time turns out sheet resistance increases at first, and then decreases in insulating phase, vice versa in metallic phase. In optical properties, the visible transmittance of VO₂ films initially drops with annealing time prolonging, afterwards the transmittance slightly recovers. Differences between the electrical and optical are due to the grain size. Moreover, VO₂ film annealing 15 min presents excellent visible transmittance, highly near-IR modulation efficiency (about 92% at a wavelength of 1100nm) and the lowest phase transition temperature (55.7°C). This result indicates that an appropriate annealing ambient can facilitate the application of VO₂ film in smart windows.

Citation Download Citation

Chunhui Ji, Zhiming Wu, Xuefei Wu, Haoqian Feng, Xueting Ma, and Yadong Jiang "Effects of annealing time on the application of vanadium dioxide films in smart windows", Proc. SPIE 9686, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices, 968612 (25 October 2016); https://doi.org/10.1117/12.2242821

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