Femtosecond laser fabricated electrofluidic devices in glass for 3D manipulation of biological samples

Jian Xu; Katsumi Midorikawa; Koji Sugioka

doi:10.1117/12.2208842

14 March 2016 Femtosecond laser fabricated electrofluidic devices in glass for 3D manipulation of biological samples

Jian Xu, Katsumi Midorikawa, Koji Sugioka

Proceedings Volume 9735, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI; 97350B (2016) https://doi.org/10.1117/12.2208842
Event: SPIE LASE, 2016, San Francisco, California, United States

Abstract

Novel electrofluidic microdevices based on monolithic integration of 3D metal electrodes into 3D glass microchannels have been prepared by femtosecond (fs) laser hybrid microfabrication. 3D microchannels with smooth internal walls are first prepared in photosensitive glass by fs laser-assisted chemical wet etching process combined with post-annealing. Then, 3D electrode patterning in prepared glass channels is carried out by water-assisted fs-laser direct-write ablation using the same laser followed by electroless metal plating. Laser processing parameters are optimized and the roles of water during the laser irradiation are discussed. The fabricated electrofluidic devices are applied to demonstrate 3D electro-orientation of cells in microfluidic environments.

Citation Download Citation

Jian Xu, Katsumi Midorikawa, and Koji Sugioka "Femtosecond laser fabricated electrofluidic devices in glass for 3D manipulation of biological samples", Proc. SPIE 9735, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI, 97350B (14 March 2016); https://doi.org/10.1117/12.2208842

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