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14 March 2016 SiO2-glass drilling by short-pulse CO2 laser with controllable pulse-tail energy
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Abstract
We developed a longitudinally excited CO2 laser that produces a short laser pulse with the almost same spike-pulse energy of about 0.8 mJ and the controllable pulse-tail energy of 6.33−23.08 mJ. The laser was very simple and consisted of a 45-cm-long alumina ceramic pipe with an inner diameter of 9 mm, a pulse power supply, a step-up transformer, a storage capacitance and a spark-gap switch. The dependence of SiO2 glass drilling on the fluence and the number was investigated by four types of short-pulse CO2 lasers. In this work, the effective short laser pulse with the spike pulse energy of 0.8 mJ for SiO2 glass drilling was the laser pulse with the pulse tail energy of 19.88 mJ, and produces the drilling depth per the fluence of 124 μm/J/cm2.
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Kazuyuki Uno, Takuya Yamamoto, Miyu Watanabe, Tetsuya Akitsu, and Takahisa Jitsuno "SiO2-glass drilling by short-pulse CO2 laser with controllable pulse-tail energy", Proc. SPIE 9735, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI, 973519 (14 March 2016); https://doi.org/10.1117/12.2211565
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