Author Affiliations +
Y. Zheng,1 Z. An,1 P. Smyrek,1,2 H. J. Seifert,1 T. Kunze,3 V. Lang,3,4 A.-F. Lasagni,3,4 W. Pfleging1,2
1Karlsruhe Institute of Technology (Germany)
2Karlsruhe Nano Micro Facility (Germany)
3Fraunhofer Institute for Material and Beam Technology (Germany)
4Technische Univ. Dresden (Germany)