In this paper, we will discuss different approaches for multibeam processing for utilization of high pulse energies. The combination of diffractive optics and conventional galvometer scanner can be used for high throughput laser ablation, but are limited in the optical qualities. We will show which applications can benefit from this hybrid optic and which improvements in productivity are expected. In addition, the optical limitations of the system will be compiled, in order to evaluate the suitability of this approach for any given application. |
ACCESS THE FULL ARTICLE
No SPIE Account? Create one
CITATIONS
Cited by 4 scholarly publications and 1 patent.
Laser ablation
Spatial light modulators
Laser processing
Laser sources
Scanners
Pulsed laser operation
High power lasers