Model order reduction for the time-harmonic Maxwell equation applied to complex nanostructures

Martin Hammerschmidt; Sven Herrmann; Jan Pomplun; Sven Burger; Frank Schmidt

doi:10.1117/12.2212367

4 March 2016 Model order reduction for the time-harmonic Maxwell equation applied to complex nanostructures

Martin Hammerschmidt, Sven Herrmann, Jan Pomplun, Sven Burger, Frank Schmidt

Proceedings Volume 9742, Physics and Simulation of Optoelectronic Devices XXIV; 97420M (2016) https://doi.org/10.1117/12.2212367
Event: SPIE OPTO, 2016, San Francisco, California, United States

Abstract

Fields such as optical metrology and computational lithography require fast and efficient methods for solving the time-harmonic Maxwell's equation. Highly accurate geometrical modelling and numerical accuracy at low computational costs are a prerequisite for any simulation study of complex nano-structured photonic devices. We present a reduced basis method (RBM) for the time-harmonic electromagnetic scattering problem based on the hp-adaptive finite element solver JCMsuite capable of handling geometric and non-geometric parameter dependencies allowing for online evaluations in milliseconds. We apply the RBM to compute light-scattering at optical wavelengths of periodic arrays of fin field-effect transistors (FinFETs) where geometrical properties such as the width and height of the fin and gate can vary in a large range.

Citation Download Citation

Martin Hammerschmidt, Sven Herrmann, Jan Pomplun, Sven Burger, and Frank Schmidt "Model order reduction for the time-harmonic Maxwell equation applied to complex nanostructures", Proc. SPIE 9742, Physics and Simulation of Optoelectronic Devices XXIV, 97420M (4 March 2016); https://doi.org/10.1117/12.2212367

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