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25 February 2016 Characterizations of diffractive microlens in Nb5N6 microbolometers array for THz detection
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Diffractive silicon microlens with ten staircases is designed and analyzed in this paper. The power distribution at the focal plane of the microlens is calculated and frequency dependence and focusing performance of the microlens is also evaluated by a FDTD method The simulation results show the diffractive lens has a good ability of focusing at 0.3 THz and around, and thus it can improve the coupling efficiency of the incident power into the Nb5N6 microbolometers. Development of a focal plane array (FPA) using such devices as detectors is favorable since diffractive microlens array has many advantages, such as light weight, low absorption loss, high resolution, and the most important point is that the microlens array can be easily integrated by ready mass production using standard micro-fabrication techniques.
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
X. C. Tu, Y. F. Pei, P. Xiao, C. T. Jiang, C. Wan, L. Kang, J. Chen, and P. H. Wu "Characterizations of diffractive microlens in Nb5N6 microbolometers array for THz detection", Proc. SPIE 9747, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications IX, 97470G (25 February 2016);

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