Multilayers for EUV, soft x-ray and x-ray optics

Zhanshan Wang; Qiushi Huang; Zhong Zhang

doi:10.1117/12.2218081

2 May 2016 Multilayers for EUV, soft x-ray and x-ray optics

Zhanshan Wang, Qiushi Huang, Zhong Zhang

Proceedings Volume 9747, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications IX; 97471K (2016) https://doi.org/10.1117/12.2218081
Event: SPIE OPTO, 2016, San Francisco, California, United States

Abstract

Driven by the requirements in synchrotron radiation applications, astronomical observation, and dense plasma diagnostics, the EUV, soft X-rays and X-rays multilayer optics have been tremendously developed. Based on the LAMP project for soft X-ray polarimetry, Co/C and Cr/C multilayers have been fabricated and characterized. Both Co/C and Cr/C multilayers reveal good optical performance working at 250 eV. Pd/Y multilayers have been successfully fabricated using reactive sputtering with nitrogen working at around 9.4 nm. EUV normal incidence Schwarzschild and soft X-ray grazing incidence KB microscopes were developed for ICF plasma diagnostics. This paper covers the outline of the multilayer optics and the current status in our lab.

Citation Download Citation

Zhanshan Wang, Qiushi Huang, and Zhong Zhang "Multilayers for EUV, soft x-ray and x-ray optics", Proc. SPIE 9747, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications IX, 97471K (2 May 2016); https://doi.org/10.1117/12.2218081

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