Impact of glycerol on zinc-oxide-based thin film transistors with indium molybdenum oxide transparent electrodes

Mateusz Mądzik; Elangovan Elamurugu; Raquel Flores; Jaime Viegas

doi:10.1117/12.2213921

27 February 2016 Impact of glycerol on zinc-oxide-based thin film transistors with indium molybdenum oxide transparent electrodes

Mateusz Mądzik, Elangovan Elamurugu, Raquel Flores, Jaime Viegas

Author Affiliations +

Proceedings Volume 9749, Oxide-based Materials and Devices VII; 97491P (2016) https://doi.org/10.1117/12.2213921
Event: SPIE OPTO, 2016, San Francisco, California, United States

Abstract

We report the fabrication of thin film transistors with ZnO channel and indium molybdenum oxide electrodes by sputtering. The fabricated transistors were then exposed to glycerol. We observe a temporary change in device performance after immersion of the FET in glycerol. Control structures without channel material are also used for demonstrating that the effect of saturation current increase is not due to glycerol alone as sugar alcohol is a low conductive medium. Various electrical and optical parameters are extracted. The presented results are useful for further integration of photonics and electronics in sensing applications

Citation Download Citation

Mateusz Mądzik, Elangovan Elamurugu, Raquel Flores, and Jaime Viegas "Impact of glycerol on zinc-oxide-based thin film transistors with indium molybdenum oxide transparent electrodes", Proc. SPIE 9749, Oxide-based Materials and Devices VII, 97491P (27 February 2016); https://doi.org/10.1117/12.2213921

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