Quartz enhanced photoacoustic leak sensor for mechatronic components

A. Sampaolo; P. Patimisco; M. Giglio; P. P. Calabrese; L. Chieco; G. Scamarcio; F. K. Tittel; V. Spagnolo

doi:10.1117/12.2209526

13 February 2016 Quartz enhanced photoacoustic leak sensor for mechatronic components

A. Sampaolo, P. Patimisco, M. Giglio, P. P. Calabrese, L. Chieco, G. Scamarcio, F. K. Tittel, V. Spagnolo

Proceedings Volume 9755, Quantum Sensing and Nano Electronics and Photonics XIII; 97550D (2016) https://doi.org/10.1117/12.2209526
Event: SPIE OPTO, 2016, San Francisco, California, United States

Abstract

We report the first demonstration of a leak sensor based on a mid-IR quartz-enhanced photoacoustic (QEPAS) spectroscopic technique. A QEPAS sensor was integrated in a vacuum seal test station for mechatronic components. The laser source is a quantum cascade laser emitting at 10.56 μm, resonant with a strong absorption band of sulfur hexafluoride (SF₆), which was selected as target gas for leak detection. The minimum detectable concentration of the QEPAS sensor is 6.9 ppb with an integration time of 1 s. This detection sensitivity allowed to measure SF6 leak flows as low as 3x10^-5 standard cm³.

Citation Download Citation

A. Sampaolo, P. Patimisco, M. Giglio, P. P. Calabrese, L. Chieco, G. Scamarcio, F. K. Tittel, and V. Spagnolo "Quartz enhanced photoacoustic leak sensor for mechatronic components", Proc. SPIE 9755, Quantum Sensing and Nano Electronics and Photonics XIII, 97550D (13 February 2016); https://doi.org/10.1117/12.2209526

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available